JPH0145131B2 - - Google Patents
Info
- Publication number
- JPH0145131B2 JPH0145131B2 JP12695582A JP12695582A JPH0145131B2 JP H0145131 B2 JPH0145131 B2 JP H0145131B2 JP 12695582 A JP12695582 A JP 12695582A JP 12695582 A JP12695582 A JP 12695582A JP H0145131 B2 JPH0145131 B2 JP H0145131B2
- Authority
- JP
- Japan
- Prior art keywords
- output
- song
- comparator
- interval
- pass filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 13
- 239000003990 capacitor Substances 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 238000009429 electrical wiring Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B3/00—Recording by mechanical cutting, deforming or pressing, e.g. of grooves or pits; Reproducing by mechanical sensing; Record carriers therefor
- G11B3/02—Arrangements of heads
- G11B3/08—Raising, lowering, traversing otherwise than for transducing, arresting, or holding-up heads against record carriers
- G11B3/095—Raising, lowering, traversing otherwise than for transducing, arresting, or holding-up heads against record carriers for repeating a part of the record; for beginning or stopping at a desired point of the record
- G11B3/0952—Raising, lowering, traversing otherwise than for transducing, arresting, or holding-up heads against record carriers for repeating a part of the record; for beginning or stopping at a desired point of the record using automatic means
- G11B3/0957—Raising, lowering, traversing otherwise than for transducing, arresting, or holding-up heads against record carriers for repeating a part of the record; for beginning or stopping at a desired point of the record using automatic means using optical means for detecting the end of the recording or the desired point thereof
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12695582A JPS5919267A (ja) | 1982-07-20 | 1982-07-20 | 自動選曲プレ−ヤの曲間検出回路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12695582A JPS5919267A (ja) | 1982-07-20 | 1982-07-20 | 自動選曲プレ−ヤの曲間検出回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5919267A JPS5919267A (ja) | 1984-01-31 |
JPH0145131B2 true JPH0145131B2 (en]) | 1989-10-02 |
Family
ID=14948028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12695582A Granted JPS5919267A (ja) | 1982-07-20 | 1982-07-20 | 自動選曲プレ−ヤの曲間検出回路 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5919267A (en]) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6924086B1 (en) | 2002-02-15 | 2005-08-02 | Tokyo Electron Limited | Developing photoresist with supercritical fluid and developer |
US6928746B2 (en) | 2002-02-15 | 2005-08-16 | Tokyo Electron Limited | Drying resist with a solvent bath and supercritical CO2 |
US7163380B2 (en) | 2003-07-29 | 2007-01-16 | Tokyo Electron Limited | Control of fluid flow in the processing of an object with a fluid |
US7169540B2 (en) | 2002-04-12 | 2007-01-30 | Tokyo Electron Limited | Method of treatment of porous dielectric films to reduce damage during cleaning |
US7208411B2 (en) | 2000-04-25 | 2007-04-24 | Tokyo Electron Limited | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
US7255772B2 (en) | 2000-07-26 | 2007-08-14 | Tokyo Electron Limited | High pressure processing chamber for semiconductor substrate |
US7270941B2 (en) | 2002-03-04 | 2007-09-18 | Tokyo Electron Limited | Method of passivating of low dielectric materials in wafer processing |
US7307019B2 (en) | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
US7387868B2 (en) | 2002-03-04 | 2008-06-17 | Tokyo Electron Limited | Treatment of a dielectric layer using supercritical CO2 |
US7399708B2 (en) | 2005-03-30 | 2008-07-15 | Tokyo Electron Limited | Method of treating a composite spin-on glass/anti-reflective material prior to cleaning |
US7434590B2 (en) | 2004-12-22 | 2008-10-14 | Tokyo Electron Limited | Method and apparatus for clamping a substrate in a high pressure processing system |
US7442636B2 (en) | 2005-03-30 | 2008-10-28 | Tokyo Electron Limited | Method of inhibiting copper corrosion during supercritical CO2 cleaning |
US7491036B2 (en) | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
US7524383B2 (en) | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
US7550075B2 (en) | 2005-03-23 | 2009-06-23 | Tokyo Electron Ltd. | Removal of contaminants from a fluid |
-
1982
- 1982-07-20 JP JP12695582A patent/JPS5919267A/ja active Granted
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7208411B2 (en) | 2000-04-25 | 2007-04-24 | Tokyo Electron Limited | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
US7255772B2 (en) | 2000-07-26 | 2007-08-14 | Tokyo Electron Limited | High pressure processing chamber for semiconductor substrate |
US6928746B2 (en) | 2002-02-15 | 2005-08-16 | Tokyo Electron Limited | Drying resist with a solvent bath and supercritical CO2 |
US7044662B2 (en) | 2002-02-15 | 2006-05-16 | Tokyo Electron Limited | Developing photoresist with supercritical fluid and developer |
US6924086B1 (en) | 2002-02-15 | 2005-08-02 | Tokyo Electron Limited | Developing photoresist with supercritical fluid and developer |
US7387868B2 (en) | 2002-03-04 | 2008-06-17 | Tokyo Electron Limited | Treatment of a dielectric layer using supercritical CO2 |
US7270941B2 (en) | 2002-03-04 | 2007-09-18 | Tokyo Electron Limited | Method of passivating of low dielectric materials in wafer processing |
US7169540B2 (en) | 2002-04-12 | 2007-01-30 | Tokyo Electron Limited | Method of treatment of porous dielectric films to reduce damage during cleaning |
US7163380B2 (en) | 2003-07-29 | 2007-01-16 | Tokyo Electron Limited | Control of fluid flow in the processing of an object with a fluid |
US7307019B2 (en) | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
US7491036B2 (en) | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
US7434590B2 (en) | 2004-12-22 | 2008-10-14 | Tokyo Electron Limited | Method and apparatus for clamping a substrate in a high pressure processing system |
US7550075B2 (en) | 2005-03-23 | 2009-06-23 | Tokyo Electron Ltd. | Removal of contaminants from a fluid |
US7399708B2 (en) | 2005-03-30 | 2008-07-15 | Tokyo Electron Limited | Method of treating a composite spin-on glass/anti-reflective material prior to cleaning |
US7442636B2 (en) | 2005-03-30 | 2008-10-28 | Tokyo Electron Limited | Method of inhibiting copper corrosion during supercritical CO2 cleaning |
US7524383B2 (en) | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
Also Published As
Publication number | Publication date |
---|---|
JPS5919267A (ja) | 1984-01-31 |
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